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Eni oem-12b user manual
Eni oem-12b user manual













eni oem-12b user manual

RF Generator: 1000 watt 13.56 MHz air cooled with automatic impedance matching network.

eni oem-12b user manual

  • Chamber: Quartz, compatible with fluorinated chemistry.
  • #ENI OEM 12B USER MANUAL GENERATOR#

    Features and Specificationsġ2″(dia) x 20″(D) quartz barrel, soft pumping and purge valving, low particulate design, 2ea mass flow gas inputs with VCR fittings, all SS plumbing, multi channel/single board computer controlled, with floppy storage, temperature controller, ENI OEM 12B 1250W RF Generator Scanning Acoustic Microscope Systems – SAMĭid you know that PVA TePla may be able to perform maintenance, repair, or provide parts to this system? Please contact our customer service department for further information.Ĩ0 M-F 8am – 5pm Pacific Time.















    Eni oem-12b user manual